Galvanometer Optical Scanners /Drivers /Drive Boards

The galvanometer system is a high-precision and high-speed servo control system composed of a driving board, galvo and scan mirror, mainly used for laser marking, laser engraving, stage lighting control, etc.

The working principle of this system is that by inputting a position signal, the oscillating motor (galvanometer) will swing a certain angle according to a certain voltage and angle conversion ratio. The entire process adopts closed-loop feedback control, which is jointly operated by five control circuits/parts: position sensor, error amplifier, power amplifier, position discriminator, and current integrator.

The OSST series galvanometer systems produced by our company utilize the latest generation of integrated circuits and adopts various anti-interference methods to drive the circuit board. The system not only has strong anti-interference ability, high reliability, good linearity, high repetition accuracy, short response time, but also has a small size, which is easy to install and transport.

Part number	OSST8162	OSST8161	OSST8063
Optical apertures supported, two-axis	≦8mm beam	≦10mm beam	≦12mm beam
Small-step response time	0.2ms@5mm beam	0.3ms@10mm beam	0.6ms@12mm beam
Max mechanical rotation angle	±20°-30 °	±20°	±20°
Linearity	99.9% @±20°	99.9%@±20°	99.9%@±20°
Peak current	5A	5A	10A
Coil resistance	3Ω±10%	1.8Ω±10%	2Ω±10%
Coil inductance	180μH ±10%	280μH ±10%	260μH ±10%
Operation temp	0℃-40℃	0℃-40℃	0℃-40℃
Operation temp. (option)	-40—﹢85	-40—﹢85	-40—﹢85
Weight	80g	105g	180g
Rotor inertia	0.125g·cm2	0.34g·cm2	1.2g·cm2
Torque constant	5.1N·mm/A	7.3N·mm/A	12 N·mm/A
Max. RMS current	2.1A	2.5 5A	3.52A
Weight with cable	72g	263 g	340g
Connector	C3030F-2*4	C3030F-2*4	C3030F-2*4
Loading inertia	0.1 g·cm2—0.54 g·cm2	0.3 g·cm2—1.52 g·cm2	1.0 g·cm2—6 g·cm2
Following error	0.11 ms	0.142ms	0.22 ms
Dimension	D15x31+D15.4x11mm	D22X36+D31x8.6+D21x9mm	D22x36+D31x8.6+D21x9mm
Mirror thickness	2.1mm	2.1mm	2.1mm
Application	Stage lighting, laser animation	Ultra high speed flying marking, ultra high speed online rapid marking	Ultra high-speed flying marking, ultra high-speed online rapid marking metal, non-metallic precision laser marking, laser rapid prototyping, laser resistance adjustment and laser radar, etc

Part number	OSST8166	OSST8168	OSST8061
Optical apertures supported, two-axis	1-6mm beam	1-10mm beam	20-25mm beam
Small-step response time	0.3ms@5mm beam	0.3ms@5mm beam	0.7ms@20mm beam
Max mechanical rotation angle	±20°	±20°	±20°
Linearity	99.9%@ ±20°	99.9%@±20°	99.9%@ ±20°
Peak current	1.5A	1.5A	6A
Coil resistance	2.3Ω±10%	2.3Ω±10%	2.1Ω±10%
Coil inductance	420μH ±10%	420μH ±10%	360μH ±10%
Operation temp	0℃-40℃	0℃-40℃	0℃-40℃
Operation temp. (option)	-40—﹢85	-40—﹢85	-40—﹢85
Weight	26g	26g	210g
Rotor inertia	0.028g·cm	2.25N·mm/A	5.1g·cm2
Torque constant	2.25N·mm/A	2.25N·mm/A	22N·mm/A
Max. RMS current	1.8A	1.8A	5A
Weight with cable	49 g		425 g
Connector	C3030F-2*4	PHD2*4	C3030F-2*4
Loading inertia	0.02 g·cm2—0.05 g·cm2	0.02 g·cm2—0.05 g·cm2	8 g·cm2—24 g·cm2
Following error	0.11 ms	0.15 ms	0.35 ms
Dimension	D10x16+D13x3+D15x10.5mm	D15X8+D14x15	D28x58+D36x15+D25x5mm
Mirror thickness	1.0mm	1.mm	3.0mm
Application	High speed online flying marking, high-speed high-precision static marking, etc	High speed online flying marking, high-speed high-precision static marking, etc	Precision laser marking, laser rapid prototyping, laser resistance modulation, laser radar, etc

Part number	OSST3808	OSST3860
Optical apertures supported, two-axis	25-50mm beam	30-60mm beam
Small-step response time	1.2ms@25mm beam	1.3ms@30mm beam
Max mechanical rotation angle	±20°	±20°
Linearity	99.9%@±20°	99.9%@±20°
Peak current	7.6A	9.6A
Coil resistance	2Ω±10%	2Ω±10%
Coil inductance	260μH ±10%	260μH ±10%
Operation temp	0℃-40℃	0℃-40℃
Operation temp. (option)	-40—﹢85	-40—﹢85
Weight	520g	520g
Rotor inertia	6.25g·cm2	8.2g·cm2
Torque constant	28N·mm/A	31·mm/A
Max. RMS current	6.3 A	12A
Weight with cable	520G	520G
Connector	C3030F-2*4	C3030F-2*4
Loading inertia	12g·cm2—24 g·cm2	12g·cm2—35 g·cm2
Following error	0.28 ms	0.35 ms
Dimension	D38X76+D36x5+D25x5mm	D38x76+D35x5+D25x5mm
Mount dia. Of the mirror	7mm	7mm
Application	Precision laser marking, laser rapid prototyping, laser resistance modulation, laser radar, etc	Precision laser marking, laser rapid prototyping, laser resistance modulation, laser radar, etc

Part number	OSST1520-20	OSST1520-15
Optical apertures supported, two-axis	≦10mm beam	≦10mm beam
Small-step response time	0.3ms@10mm beam	0.3ms@10mm beam
Max mechanical rotation angle	±20°	±20°
Linearity	99.9%@±20°	99.9%@±20°
Peak current	5A	5A
Coil resistance	1.62Ω±10%	1.8Ω±10%
Coil inductance	103μH ±10%	280μH ±10%
Operation temp	0℃-40℃	0℃-40℃
Operation temp. (option)	-40—﹢85	----
Weight	105g	33g
Rotor inertia	0.34g·cm2	0.34g·cm2
Torque constant	7.5N·mm/A	7.5N·mm/A
Max. RMS current	2.5 A	2.5 A
Weight with cable	263 g	Socket
Connector	PHD2*4	PHD2*4
Loading inertia	0.35 —1.5 g·cm2	0.35 —1.5 g·cm2
Following error	0.15 ms	0.15 ms
Dimension	D20X26+D15x11mm/37mm	D15X26+D15x11mm/37mm
Mirror thickness	2.0mm (to be stuck)	2.0mm (to be stuck)
Application	Ultra high speed flying marking, ultra high speed online rapid marking	Ultra high speed flying marking, ultra high speed online rapid marking

Remarks:

• All the galvos are chrome coated cover.
• The scan mirrors at the laser wavelengths of 1064nm, 532nm, 355nm, 266nm, 10.6um and others are available upon request.

OSST Series Drivers (Drive Boards)

There are 2 types of drive boards for OSST series galvos: one board to drive 2 galvos (1-to-2 board or just called board, default); one board to drive 1 galvo (1-to-1 board). Their driving capabilities and main performance are same. The main difference is the dimension.

General specifications:

• Supply power: ±15VDC to ±24VDC
• Analog input position signal: ±5V (default), ±10V available upon requestion.
• Position signal output (option): 1:1 port and 1:10 port.

1. 1-to-2 Boards

1.1 1-to-2 Board without Position Output Signal (OSST-D)

This driver is mostly used in 2D laser marking/scanning.

1.2 1-to-2 Board with Position Signal Output (OSST-D-PO)

2. 1-to-1 Boards

1-to-2 Board with Position Signal Output (OSST-D-1-PO)

There are 2 position signal outputs for use.

3. OSCT Series Optical Galvanometers

Our broad range of closed loop galvanometer-based optical scanning components and systems offer the systems integrator the maximum galvanometer-based performance for any positioning or scanning requirement. Our superior positioning performance comes from advanced actuator designs, innovative patented position detection techniques, the consistency of our high quality manufacturing process and our continued commitment to advancing the state of galvo technology. With our extensive range of scanning options, application expertise and world-wide technical support, we are ready to be your partner in scientific and OEM optical system applications.

Just as important as our superior positioning system performance is the product reliability, lifetime and support that you need for long term system and market success. Superior product lifetime and reliability result from disciplined design technique and simulation, the best in bearing and component technology and quality manufacturing processes and workmanship. We take great pride in the performance and the extensive lifetime of our products. These high standards in our manufacturing processes guarantee the performance consistency that you need to design the high calibre systems demanded in today’s competitive marketplace.
We offer a complete range of closed loop galvanometers, servo drivers and system options for the maximum in price/performance options, system design flexibility and ease of integration.

Optical Galvanometers

• Proprietary Moving Magnet Actuator Technology for the highest positioning speed.
• Proprietary Moving Coil Actuator Technology for the highest positioning accuracy.
• Patented Capacitive Position Detector Technology for the highest positioning accuracy and stability
• Patented Optical Position Detector Technology offers positioning accuracy at lower cost.
• Product Consistency and Reliability for extended system lifetimes and uptime.
• A Broad Range of Products sized for optimum performance for apertures from 1mm to 50mms.

These galvo technologies are offered in three families of optical scanning products.

• The Moving Magnet Scanners with Advanced Optical Position Detector (62xxH series such as 6200H, 6210H, 6215H, 6220H, 6230H, 6231H, 6240H, 6250H, 6260H, and 83xxK series such as 8300K, 8310K, 8315K, 8320K, 8330K, 8331K, 8340K, 8350K, 8360K )
• The Moving Magnet Scanners with Capacitive Position Detector (Model 6860, 6870, 6880)
• The Moving Coil Scanners with Capacitive Position Detector (Model 6350, 6450, 6650, 6900, 6400)

Servo Drivers (Drive boards)

The key Servo Driver Technologies and offerings include:

• Surface Mount Technology (SMT) driver boards for compact system size.
• Proprietary Class 1 Integrating Servo Drivers for the highest positioning accuracy and stability.
• Proprietary Class 0 Non-Integrating Servo Drivers for the highest speed and lowest cost.
• System Control and Interface Features for ease of system integration.

These servo technologies are offered in analog and digital versions. The analog drivers include 670, 671, 672, 673, 677 series and the digital drivers include DC900, DC2000, and D3000 plus.

System Options

For more complete levels of system integration and solutions, we also provide the following system components and solutions:

• Standard Two Axis X/Y Mounts and Mirrors Sets from 3mm to 50mm apertures (called marking heads, laser scanners).
• Standard and Custom Mirrors for all galvos.
• Standard and Custom Interface Cables.
• PositionProtm PC-based Hardware and Software Galvo Control.

1. OSCT Series Optical Galvanometers

• The combination of our Moving Magnet Actuator technology and our innovative patented Advanced Optical Position Detector design offers the highest positioning speed and excellent accuracy in the smallest, lower cost closed loop galvanometers. Scanning system applications can be designed and optimized for speed, size, cost and accuracy with typical beam diameters in the 1 to 3mm range.

• The Moving Magnet Scanner's Positioning Speed comes from advanced galvanometer and actuator design for the highest system resonant frequency and RMS power capability. The higher resonant frequency of our moving magnet actuator design, the intense magnetic field strength of state of the art neodymium-iron-boron magnets and our advanced servo driver options allow superior system bandwidths, step response times and repetition rates with excellent wobble and jitter performance.

• Our newly patented advanced optical position detector design coupled with the positioning precision of the moving magnet actuator provides excellent repeatability and accuracy . The advanced optical position detector is designed to provide high positioning linearity, repeatability and stability over time and temperature, and lower closed loop galvo cost in the smallest, most compact package.

• Superior product lifetime and reliability result from disciplined design technique, the best in bearing technology and quality manufacturing processes and workmanship. We take great pride in the performance of our products. Our scanner designs are computer modelled and have been life-test proven to billions of cycles of operation. Our high standards of manufacturing quality guarantees the performance consistency that you need to design the high quality systems demanded in today's competitive marketplace.

1.1 62xxH Series Optical Galvanometers

Our popular 62xxH Series of closed loop, galvanometer-based scanners is consistently the industry’s leading solution for high-performance laser beam steering. Each motor combines our moving magnet actuator technology with a position detector only available from Cambridge Technology. This patented technology features stable positioning while achieving the fastest scan speeds available in its category. Whether your focus is on speed, accuracy, or footprint, the 62xxH Series delivers both performance and value.
Attain high-performance and reliability for your value-driven application:

• Industry’s fastest motor speeds deliver maximum throughput with long-term reliability
• High-accuracy output across a diverse range of application scanning needs
• Robust design supports consistent stability over long product lifetimes
• Footprint of compact models ensures ease of integration for small spaces
• Available with a wide range of mirrors sizes (3 to 50 mm) and coating options

Part number	6200H	6210H	6215H	6220H
Recommended Aperture Size (mm)	3 to 7	3 to 7	3 to 7	5 to 10
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)	40°	40°	40°	40°
Rotor Inertia (gm·cm2, ±10%)	0.013	0.018	0.028	0.125
Torque Constant (dyne·cm/amp, ±10%)	1.20x104	2.79x104	3.78x104	6.17x104
Maximum Rotor Temperature (°C)	110°	110°	110°	110°
Thermal Resistance (Rotor to Case) (°C/watt, max)	3.8	2.0	1.0	1.0
Coil Resistance (ohms, ±10%)	2.14	3.7	2.5	2.79
Coil Inductance (ΩH, ±10%)	52	109	94	180
Back EMF Voltage (ΩV/°/sec, ±10%)	20.9	48.7	66	108
RMS Current (A at Tcase = 50°C, maximum)	2.3	2.4	4.1	3.9
Peak Current (A, maximum)	6	8	20	20
Small Angle Step Response1 (typical)	3 mm Y mirror 130 Ωs	3 mm Y mirror 100 Ω	3 mm Y mirror 200 Ω	5 mm Y mirror 250 Ω
Weight (grams, typical)	13.3	18	25.8	42.5
Dimension (mm)	12.7x29	12.7x37.3	12.7x53.8	15.3x52

Part number	6230H	6231H	6240H	6250H	6260H
Recommended Aperture Size (mm)	8 to 15	8 to 15	12 to 25	25 to 75	30 to 100
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)	40°	40°	40°	40°	40°
Rotor Inertia (gm·cm2, ±10%)	0.97	0.82	2.4	15.6	47.5
Torque Constant (dyne·cm/amp, ±10%)	1.31x105	1.11x105	2.0x105	7.08x105	8.5x105
Maximum Rotor Temperature (°C)	110	110	110	110	110
Thermal Resistance (Rotor to Case) (°C/watt, max)	0.8	1.0	0.62	0.35	0.2
Coil Resistance (ohms, ±10%)	1.07	1.27	1.03	1.69	0.60
Coil Inductance (ΩH, ±10%)	173	176	350	1030	530
Back EMF Voltage (ΩV/°/sec, ±10%)	229	195	346	1220	1480
RMS Current (A at Tcase = 50°C, maximum)	7.1	5.8	8.2	7.1	12
Peak Current (A, maximum)	25	25	25	20	40
Small Angle Step Response1 (typical)	10mm mirror 250us	10mm Y mirror 250us	15mm Y mirror 350us	50 mm Y mirror 3ms	50 mm Y mirror 2.1ms
Weight (grams, typical)	267	142	356	590	1200
Dimension (mm)	33x70	33x68.2	33x86.5	40.6x113.4	40.6x159.9

Position Detector (specifications common across all models):

Linearity	99.9% minimu m, over 20°; 99.5% typical, over 40°
Scale Drift	50 ppm/°C, maximum
Zero Drift	15 Ωrad/°C, maximum
Repeatability, Short-Term	8 Ωrad
Output Signal, Common Mode	155 ΩA minimum, with AGC current of 30 mA
Output Signal, Differential Mode	12 ΩA/° (±2.5%) at common mode current of 155 ΩA
Output Signal, Common Mode to Differential Mode Ratio	12.5 (±2.5%)

(1) Model 6210H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

Supports apertures of 3mm, 4mm, 5mm, 6mm, and 7mm. Shown here with A connecter and 3mm Y mirror.All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical

Rated Angular Excursion:	40°
Rotor Inertia:	0.018 gm cm2 , +/-10%
Torque Constant:	2.79x104 dyne cm/amp, +/-10%
Maximum Rotor Temperature:	110° C
Thermal Resistance (Coil to Case):	2° C/Watt, Max

Electrical/Drive Mechanism

Coil Resistance:	3.72 Ohms, +/-10%
Coil Inductance:	109 µH, +/-10%
Back EMF Voltage:	48.7 µV/degree/sec, +/-10%
RMS Current:	2.4 Amperes at Tcase of 50° C, Max
Peak Current:	8 Amperes, Max
Small Angle Step Response Time:	100 µs, with 3mm, Y mirror, settled to 99%

Position Detector

Linearity:	99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:	50 PPM/° C, Maximum
Zero Drift:	15 µrad/° C, Maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:	12 µA/°, at common mode current of 155 µA, +/-20%

(2) Model 6230H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6230H galvanometer can be designed and optimized for speed, size, cost and accuracy with typical beam diameters of 8mm, 10mm, 12mm, and 15mm. It is shown here with a 10mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.

Mechanical Specifications

Rated Angular Excursion:	40°
Rotor Inertia:	0.97 gm cm2, +/-10%
Torque Constant:	1.31x105 dyne cm/amp, +/-10%
Maximum Rotor Temperature:	110°C Thermal
Resistance (Rotor to Case):	0.80°C/Watt, Max

Electrical Specifications/Drive Mechanism

Coil Resistance:	1.07 Ohms, +/-10%
Coil Inductance:	173 uH, +/-10%
Back EMF Voltage:	229 µV/degree/sec, +/-10%
RMS Current:	7.1 Amperes at Tcase of 50°C, Max
Peak Current:	25 Amperes, Max
Small Angle Step Response Time:	250 µs, with 8mm Y Mirror, settled to 99% 250 µs, with 10mm Y mirror, settled to 99%

Position Detector

Linearity:	99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:	50 PPM/°C, Maximum
Zero Drift:	15 µrad/°C, Maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:	11.7 µA/°, at common mode current of 155 µA, +/-20%

• 6230HM50A MiniCT split cable 671XX connectors with 12” cable, ±25 optical degrees. Mxx denotes maximum optical degrees.
• 6230HB with 67723H will work
• 6230H with 67123H & adaptor cable 6010-20-xxx will work.
• 6230HA with 671 will work.

Remark: if the connectors of the galvo and drive board are not matched, an adaptor cable is needed to make them matched. For example, an adaptor cable is needed if you want to use 6230HB with 67123H.

(3) Model 6231HC Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6231H supports apertures of 8mm, 10mm, 12mm, and 15mm. It is shown here with the C connector and a 10mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical

Rated Angular Excursion:	40°
Rotor Inertia:	0.82 gm cm2 , +/-10%
Torque Constant:	1.11x105 dyne cm/amp, +/-10%
Maximum Rotor Temperature:	110° C
Thermal Resistance (Rotor to Case):	1° C/Watt, Max

Electrical/Drive Mechanism

Coil Resistance:	1.27 Ohms, +/-10%
Coil Inductance:	176 µH, +/-10%
Back EMF Voltage:	195 µV/degree/sec, +/-10%
RMS Current:	5.8 Amperes at Tcase of 50° C, Max
Peak Current:	25 Amperes, Max
Small Angle Step Response Time:	250 µs, with balanced load of 0.3 gm*cm2

Position Detector

Linearity:	99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:	50 PPM/° C, Maximum
Zero Drift:	15 µrad/° C, Maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:	11.7 µA/°, at common mode current of 155 µA, +/-20%

(4) Model 6231HB Moving Magnet Closed Loop Galvanometer Based Optical Scanner

Mechanical Specifications
Optical Aperture, Two-Axis, Std	8, 10 & 12	mm
Rated Angular Excursion	40	º
Rotor Inertia	0.82	gm*cm2, +/ - 10%
Torque Constant	11,100	dyne-cm/amp, +/ - 10%
Maximum Coil Temperature	110	ºC
Thermal Resistance (Coil to Case)	1.0	ºC/Watt, Max
Electrical Specifications Drive Mechanism
Coil Resistance	1.27	Ohms, +/- 10%
Coil Inductance	176	ΩH, +/- 10%
Back EMF voltage	195	mV/degree/sec, +/- 10%
RMS Current	5.8	Amperes at Tcase of 50ºC, Max
Peak Current	25	Amperes, Max
Small Angle Step Response Time	0.25	ms, with balanced load of 0.3 gm*cm2
Position Detector
Linearity	99.99	Minimum, over 20 degrees
Scale Drift	50	PPM/ºC, Maximum
Zero Drift	15	Ωrad/º C, Maximum
Repeatability, Short Term	8	microradians
Output Signal, Common Mode	155	ΩA with AGC current of 30 mA, +/-20%
Output Signal, Differential Mode	11.7	ΩA/º, at common mode current of 155 ΩA, +/-20%
Driver	67723

(5) Model 6240H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6240H galvanometer can be designed and optimized for speed, size, cost and accuracy with typical beam diameters of 12mm, 15mm, 20mm, 25mm, and 30mm. It is shown here with a 12mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degree. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:	40°
Rotor Inertia:	2.4 gm cm2, +/-10%
Torque Constant:	2.0x105 dyne cm/amp, +/-10%
Maximum Coil Temperature:	110°C
Thermal Resistance (Coil to Case):	0.62°C/Watt, Max

Electrical Specifications/Drive Mechanism

Coil Resistance:	1.03 Ohms, +/-10%
Coil Inductance:	350µH, +/-10%
Back EMF Voltage:	346 µV/degree/sec, +/-10%
RMS Current:	8.2 Amperes at Tcase of 50°C, Max
Peak Current:	25 Amperes, Max
Small Angle Step Response Time:	300 µs, with 12mm Y mirror, settled to 99% 350µs, with 15mm Y mirror, settled to 99% 650 µs, with 20mm Y mirror, settled to 99%

Position Detector

Linearity:	99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:	50 PPM/°C, Maximum
Zero Drift:	15 µrad/°C, maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:	11.7 µA/°, at common mode current of 155 µA, +/-20%

1.2 83xxK Series Optical Galvometers

Our 83xxK Series of scanners builds on the 62xxH Series’ speed and reliability with even higher resolution and thermal stability for the most demanding, high-precision applications. Each model includes our best-in-class, moving magnet actuator technology and enhanced position detector only available from Cambridge Technology. With its lower drift and noise, the 83xxK Series is ideal for applications requiring precise features such as micromachining and large field applications that are dependent on stability.
Achieve the highest level of scanning accuracy, speed, and reliability:

• Industry’s fastest motor speeds, with even higher resolution and stability
• Superior precision and accuracy that ensures high-quality processing output
• Robust design supports consistent reliability over long product lifetimes
• Footprint of compact models ensures easy system integration for small spaces
• Available with a wide range of mirror sizes (3 to 50 mm) and coating options

Part number	8300H	8310H	8315H	8320H
Recommended Aperture Size (mm)	3 to 7	3 to 7	3 to 7	5 to 10
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)	40°	40°	40°	40°
Rotor Inertia (gm·cm2, ±10%)	0.013	0.018	0.028	0.125
Torque Constant (dyne·cm/amp, ±10%)	1.20x104	2.79x104	3.78x104	6.17x104
Maximum Rotor Temperature (°C)	110°	110°	110°	110°
Thermal Resistance (Rotor to Case) (°C/watt, max)	3.8	2.0	1.0	1.0
Coil Resistance (ohms, ±10%)	2.14	3.7	2.5	2.79
Coil Inductance (ΩH, ±10%)	52	109	94	180
Back EMF Voltage (ΩV/°/sec, ±10%)	20.9	48.7	66	108
RMS Current (A at Tcase = 50°C, maximum)	2.3	2.4	4.1	3.9
Peak Current (A, maximum)	6	8	20	20
Small Angle Step Response1 (typical)	3 mm Y mirror 130 Ωs	3 mm Y mirror 100 Ω	3 mm Y mirror 130 Ω	5 mm Y mirror 250 Ω
Weight (grams, typical)	13.3	18	25.8	42.5
Dimension (mm)	12.7x29	12.7x37.3	12.7x53.8	15.3x52

Part number	8330H	8331H	8340H	8350H	8360H
Recommended Aperture Size (mm)	8 to 15	8 to 15	12 to 25	25 to 75	30 to 100
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)	40°	40°	40°	40°	40°
Rotor Inertia (gm·cm2, ±10%)	0.97	0.82	2.4	15.6	47.5
Torque Constant (dyne·cm/amp, ±10%)	1.31x105	1.11x105	2.0x105	7.08x105	8.5x105
Maximum Rotor Temperature (°C)	110	110	110	110	110
Thermal Resistance (Rotor to Case) (°C/watt, max)	0.8	1.0	0.62	0.35	0.2
Coil Resistance (ohms, ±10%)	1.07	1.27	1.03	1.69	0.60
Coil Inductance (ΩH, ±10%)	173	176	350	1030	530
Back EMF Voltage (ΩV/°/sec, ±10%)	229	195	346	1220	1480
RMS Current (A at Tcase = 50°C, maximum)	7.1	5.8	8.2	7.1	12
Peak Current (A, maximum)	25	25	25	20	40
Small Angle Step Response1 (typical)	10mm mirror 250us	10mm Y mirror 250us	15mm Y mirror 350us	50 mm Y mirror 3ms	50 mm Y mirror 2.1ms
Weight (grams, typical)	267	142	356	590	1200
Dimension (mm)	33x73	33x68.2	33x86.5	40.6x113.4	40.6x159.9

Position Detector (specifications common across all models):

Linearity	99.9% minimu m, over 20°; 99.5% typical, over 40°
Scale Drift	15 ppm/°C, maximum
Zero Drift	5 Ωrad/°C, maximum
Repeatability, Short-Term	8 Ωrad
Output Signal, Common Mode	283 ΩA minimum, with AGC current of 60 mA
Output Signal, Differential Mode	22.6ΩA/° (±2.5%) at common mode current of 283 ΩA
Output Signal, Common Mode to Differential Mode Ratio	12.5 (±2.5%)

1.3 Model 6870 Moving Magnet Capacitive Position Detector Optical Scanner

Supports 12mm and 15mm beam apertures. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degree. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:	40°
Rotor Inertia:	2.0 gm*cm2, +/-10%
Torque Constant:	1.8X105dyne-cm/amp, +/-10%
Maximum Coil Temperature:	110°C
Thermal Resistance (Coil to Case):	1.0°C/Watt, Max
Dimension	40.6x73.2mm

Electrical Specifications/Drive Mechanism

Coil Resistance:	1.4 Ohms, +/-10%
Coil Inductance:	275uH, +/-10%
Back EMF Voltage:	0.3mV/degree/sec, +/-10%
RMS Current:	5.3 Amperes at Tcase of 50°C, Max
Peak Current:	25 Amperes, Max
Small Angle Step Response Time:	0.7ms, with balanced 2.0gm*cm2 load

Position Detector

Linearity:	99.9%, Minimum, over 40 degrees
Scale Drift:	50PPM/°C, Maximum
Zero Drift:	15 microradians/°C, Maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	585 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:	14.5 µA/degree, at common mode current of 585 µA, +/-20%

1.4 Model 6880 Moving Magnet Capacitive Position Detector Optical Scanner

Supports 20 mm and 30 mm beam apertures.

• 6880 has D-sub 9 connector and +/-40o optical
• 6880A has MiniCT split cable and +/-40 o optical
• 6880M has D-sub 9 connector and +/-20o optical
• 6880MA has MiniCT split cable and +/-20 o optical
• 6880M140 has D-sub 9 connector and +/-60o optical
• 6880MA140 has MiniCT split cable and +/-60 o optical

All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:	40°
Rotor Inertia:	6.4 gm*cm2, +/-10%
Torque Constant:	2.54X105dyne-cm/amp, +/-10%
Maximum Coil Temperature:	110°C
Thermal Resistance (Coil to Case):	0.75°C/Watt, Max
Dimension	40.6x75.1mm

Electrical Specifications/Drive Mechanism

Coil Resistance:	1.0 Ohms, +/-10%
Coil Inductance:	280uH, +/-10%
Back EMF Voltage:	0.44mV/degree/sec, +/-10%
RMS Current:	7.5 Amperes at Tcase of 50°C, Max
Peak Current:	25 Amperes, Max
Small Angle Step Response Time:	0.9ms, with balanced inertia matched load

Position Detector

Linearity:	99.9%, Minimum, over 40 degrees
Scale Drift:	50PPM/°C, Maximum
Zero Drift:	10 microradians/°C, Maximum
Repeatability, Short Term:	8 microradians
Output Signal, Common Mode:	970 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:	22 µA/degree, at common mode current 970 µA, +/- 20%

1.5 Model 6450 Moving Coil Closed Loop Galvanometer Based Optical Scanner with Capacitive Position Detector

Supports 12 mm apertures. All Position Detector specifications apply with our servo drivers after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instruction.
Mechanical Specifications

Rated Angular Excursion:	40°
Rotor Inertia:	2.3 gm*cm2, +/-10%
Torque Constant:	0.45X106dyne-cm/amp, +/-10%
Maximum Coil Temperature:	150°C
Thermal Resistance (Coil to Case):	5.0°C/Watt, Max
Dimension	41.2x108.2mm

Electrical Specifications/Drive Mechanism

Coil Resistance:	4.0 Ohms, +/-10%
Coil Inductance:	450uH, +/-10%
Back EMF Voltage:	0.8mV/degree/sec, +/-10%
RMS Current:	1.8 Amperes at Tcase of 50°C, Max
Peak Current:	6.0 Amperes, Max
Small Angle Step Response Time:	2.0ms, with balanced inertia matched load

Position Detector

Linearity:	99.9%, Minimum, over 40 degrees
Scale Drift:	50PPM/°C, Maximum
Zero Drift:	15 microradians/°C, Maximum
Repeatability, Short Term:	2 microradians
Output Signal, Common Mode:	970 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:	21.5 µA/degree, at common mode current 970 µA, +/-20%

Driver: 67045

2. Servo Electronics

Our performance PID drivers are fully-featured servos available in compact, dual-axis, and high power configurations. Delivering both accuracy and power, our driver solutions support even the most demanding applications requiring fast speeds with high repeatability, linearity, and stability. The combination of size, performance, and flexibility make our analog servos the ideal choice for your integrated scanning systems.
Get value-for-performance in a compact size with maximum drive power

• Designed for stability and high-bandwidth control that enables maximum throughput
• Compact product sizes ensure flexible, easy integration within complex systems
• On-board protection circuitry provides reliability during evaluation and operation
• Includes convenient outputs for galvanometer position, error, and velocity signals
• Fully-optimized performance with Cambridge Technology scanning products

2,1 Analog Servo Drivers

(1) List and Comparison of 671, 672 and 673

Part Number	671 Series Single	672 Series Single	673 Series Dual
Output Stage	Differential	Single-Ended	Differential
Analog Input Impedance	200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)	200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)	200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)
Analog Output Impedance	1K +/- 1% ohms (for all other observation outputs)	1K +/- 1% ohms (for all other observation outputs)	2K +/- 1% ohms (for the Position Output and Current Monitor observation pins) 4.75k +/- 1% ohms for all other observation pins
Position Input Scale Factor	0.5 volt/mechanical degree (2 degrees/volt), other configurations available	0.5 volt/mechanical degree (40° system), 0.67 volt/degree (30° system)	0.5 volt/mechanical degree (2 degrees/volt), other configurations available
Position Input Range	+/- 10 volts, maximum	+/- 10 volts, maximum	+/- 10 volts, maximum
Position Offset Range	+/- 5% of Input Range, typical	+/- 5% of Input Range, typical	+/- 5% of Input Range, typical
Digital Position Input Range	216 dac counts	N/A	N/A
Non Linearity of 16-Bit Digital Input	0.006% of full scale, maximum	N/A	N/A
Position Output Scale Factor	0.5 volt/degree	0.5 volt/degree	0.5 volt/degree
Error Output Scale Factor	0.5 volt/degree	0.5 volt/degree	N/A
Velocity Output Scale Factor	Analog output (scaled by position differentiator gain)	Analog output (scaled by position differentiator gain)	Analog output (scaled by position differentiator gain)
Fault Output	Open collector: 1K ohm output impedance (pulls down to -15V), with 10mA sink capability	TTL output pulled up to a +5V supply voltage with a 100k resistor. High level = 2.5V, low level = 0V	CMOS output with 4.75k ohm in series High level = 11.5V, low level = .05V
Temperature Stability of Electronics	20 ppm per °C	20 ppm per °C	20 ppm per °C
Power Supply Requirements	+/- 15 to +/- 28VDC configurations available	+/- 15 to +/- 28VDC configurations available	+/- 15 to +/- 28VDC configurations available
Maximum Drive Current Limit	10 amps peak1 5 amps rms (power supply and load dependent)	10 amps peak 5 amps rms (power supply and load dependent)	10 amps peak 5 amps rms (power supply and load dependent)
Operating Temperature Range	0 - 50°C	0 - 50°C	0 - 50°C
Dimensions (Board with heatsink bracket; approximate, cm)	10.16 x 6.68 x 2.69 cm	5.40 x 6.03 x 2.69 cm	10.03 x 7.75 x 3.07 cm

(2) MicroMax® Model 677XX Single Axis

FEATURES:

• Smallest Servo Driver For Compact, Low Cost System Integration
• Position, Error and Velocity Output Signals
• Input Scale and Offset Adjustment
• On Board Protection Circuitry

The MicroMax Model 677XX Class 0 non-integrating driver provides an extremely compact, high performance and fully featured servo package. At just 2 inches in width and 2.5 in length it is among the smallest servo drivers commercially available, bringing easier integration to your scanning solution. Featuring automatic gain control (AGC), low noise system damping, linearity compensation and high stability components, the 677XX servo provides high quality and stable positioning.

Designed with flexibility in mind, the MicroMax Model 677XX features differential analogue inputs, flexible power supply configurations and positioning control allowing for optimization of system positioning angles, speed and accuracy. System position, velocity and error output signals make integrations into complex scanning system applications easy and accurate. Integral mounting hardware, low profile connectors and the overall small size allow for compact system designs with easy integration.

The New Smaller Size MicroMax 677XX single axis servo driver can be configured for optimal performance with our 6200 and 6800 line of closed loop, galvanometer based optical scanners. Used with our patented position detection galvanometer technology, the MicroMax 677XX provides improved time and temperature stability without the need for thermal compensation. On board protection circuitry ensures reliable system control during integration and operation. To guarantee safe operation and extended product lifetime, the MicroMax 677XX monitors and controls galvanometer rms power and features a socketed fuse for added system protection. It also utilizes servo signal conditioning to maintain controlled performance within rated angular excursion limits. This combination of size, flexibility and price make the MicroMax Model 677XX the ideal choice where high levels of speed and performance are required in the most compact environment.

Specifications:

Analog Input Impedance	400K +/-1% ohms (Differential)
	200K +/-1% ohms (Single Ended)
Analog Output Impedance	1K +/-1% ohms (for all other observation outputs)
Position Input Scale Factor	0.5 volt/mechanical degree (40o System), 0.67 volt/degree (30o System)
Position Input Range	+/-10 volts, maximum
Position Offset Range	+/-10 volts
Position Output Scale Factor	0.5 volt/degree
Error Output Scale Factor	0.5 volt/degree
Velocity Output Scale Factor	Analog output (scaled by position differentiator gain)
Power Supply Requirements	+/-15 to +/-28VDC configurations available
Maximum Drive Current Limit	10 amps peak,5 amps rms (power supply and load dependent)
Operating Temperature Range	0 -50 oC
Size	5.08 cm x 6.35 cm x 2.69 cm

The 677 servo board is available in a variety of configurations, as detailed below:

(3)The MicroMax® Model 673XX Dual Axis

The MicroMax® Model 673XX Dual Axis Driver Board: our dual axis servo offers integrating or non-integrating servo loop configurations, error and/or slew rate input signal conditioning and high stability components for extremely accurate positioning in applications that demand the best repeatability, linearity, stability and cost in a very compact system. Low profile connectors and the dual axis design of the 673XX allow for ease of integration in any system, while built-in system conditioning and status monitoring ensures complete and reliable system control.

(4) Servo Driver MicroMax® 671XX Single Axis

The MicroMax® 671XX Driver Board: our advanced servo topology and the availability of Class 1 error integration provides excellent positioning repeatability, accuracy and stability in a compact single axis configuration. High stability components provide excellent time and temperature stability. Built-in system conditioning and status monitoring ensures complete and reliable system control during integration and operation.
We offer a digital input option with the 671 and 670 servo drivers. The Model 6757 Parallel Digital Interface is a module that mounts onto the MicroMax Servo Controller. This allows the user to provide a 16 BIT parallel digital position command. There are also four control lines allowing the user to address and control each input module using one 16 BIT data bus. The servo driver easily be configured to switch between digital and analog position command control. Each module is supplied with a mating single ended cable. One module is needed for each scanner. This is optional and is only required if a digital command is being used. This option can be easily added at a later date.

The 671 servo board is available in a variety of configurations, as detailed below:

(5) Servo Driver MicroMax® 670XX Single Axis

As the complexity and specification requirements of today's optical systems increase, so does the need for high performance, high accuracy, and compact mirror positioning systems. The MicroMaxTM Series 670 system was designed for applications that require high performance specifications.

The Series 670 Single axis Board-Level Mirror Positioning System consists of a

single-channel servo amplifier on a 2.50” x 4.00” board and a high performance scanner. The scanner is designed for a specific range of inertial loads, allowing mirrors with inertias from less than 0.001 gm-cm2 to greater than 100,000 gm-cm2 to be precisely controlled.

All angles are in mechanical degree. All specifications apply after a 1 minute warm up period.

Analog Input Impedance	200K + 1% ohms (Differential); 100K + 1% ohms (Single Ended)
Position Output Impedance	1K + 1% ohms (For all observation outputs)
Position Input Scale Factor	0.5 volt/o (2o/volt)
Analog Position Input Range	+ 10 volts max
Digital Position Input Range	216 dac counts
Non-Linearity of 16 Bit Digital Input	0.006% of full scale, max
Position Offset Range	+ 2 volts
Pos. Output Scale Factor	0.5 volt/o
Error Output Scale Factor	0.5 volt/o
Velocity Output Scale Factor	Analog (scaled by position differentiator gain)
Fault Output	Open Collector, 1K ohm output impedance (pulls down to –15V), with 10mA sink capability
Temperature Stability of Electronics	20PPM per oC
Input Voltage Requirements	+/-15 to +/-28VDC (current varies with motor configuration)
Maximum Drive Current Limit, Peak	10 Amperes
Maximum Drive Current Limit, RMS	5 Amperes (power supply, load, & heat sink dependent.)
Operating Temperature Range	0 - 50°C
Size	4.0in x 2.in x 1.06in; 10.16cm x 6.35cm x 2.69cm
Weight	3.07 ounces (87 grams)

2.2 Digital Servo Drivers

Our digital servo drivers feature self-calibration, state-space control, and command input optimization, features that are ideal for scanning applications demanding the highest speeds and accuracy. The drivers’ patented technology delivers maximum system performance, flexibility, and ease of use with on-board processors that characterize the scanning components every time you turn on the system. For ease of integration, our compact DC Model servos include flexible power supply configurations, integral mounting hardware, and low-profile connectors.

Take full control using our easy-to-integrate, high-performance servos

• Simulation-based, pre-filtering algorithms for optimization of motion control
• Self-tuning and start-up calibration provide reduced system manufacturing cost
• Simplified field service increases savings and system up-time
• Compact, flexible servo footprint is easy to configure within complex systems
• Optimized performance provided with Cambridge Technology scanning products

Part Number	DC900 Model	DC2000 Model	DC3000 Plus Model (low noise)
Number of Axes	Single	Dual	Dual
Command Input	Analog (±5V differential, ±10V single-ended) XY2-100 High Speed Serial Digital	XY2-100 High Speed Serial Digital	XY2-100 High Speed Serial Digital
Analog Input Impedance	400K +/-1% ohms (Differential) 200K +/-1% ohms (Single Ended)	—	—
Analog Output Impedance	1K +/-1% ohms (for all observation outputs)	The un-terminated output of OPA2227, <1Ω	The un-terminated output of OPA2227, <1Ω
Position Input Scale Factor	0.50 volt/degree (40°system) 0.67volt/degree (30°system) 1.00 volt/degree (20°system)	—	—
Analog Position Input Range	+/- 10 volts max	—	—
Position Output Scale Factor	0.5 volt/degree	0.333V/degree non-differential	0.333V/degree non-differential
Power Supply Requirements	+/-15 to +/-32VDC configurations available	+/-15 to +/-32VDC configurations available	+/-15 to +/-28VDC configurations available
Maximum Drive Current Limit	8 amps peak, 5 amps rms (power supply and load dependent)	10 amps peak, 2.5 amps rms (per axis) (power supply and load dependent)	20 amps peak, 5 amps rms (per axis) (power supply and load dependent)
Quiescent Power	15W	16W	11.5W
Dither (RMS)	8 Ωrad	7 Ωrad	4 Ωrad
Operating Temperature Range	0 - 50°C	0 - 50°C	0 - 50°C
Dimensions1	5.14 x 10.48 x 4.45 cm	10.50 x 7.50 x 6.44 cm	10.50 x 7.50 x 6.44 cm

For more detailed information on CTI series galvos, please download here.